Self-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition
Researchers developed a new manufacturing technique using atomic layer deposition to precisely deposit a thin oxide coating on silicon dioxide while avoiding unwanted deposition on copper surfaces. This method uses an ethanol reduction step to keep the copper from oxidizing and accepting the coating material. When tested on tiny copper and silicon dioxide patterns about 100 nanometers across, the coating grew only where desired, achieving perfect selectivity without any defects.